Simulation of the Young's Modulus Anisotropy in CVD Diamond Film

被引：0
|
作者：
Zhu, H. X. [1 ,2 ]
Gu, C. [1 ]
Xue, Y. D. [3 ]
Ren, F. Z. [1 ,2 ]
机构：
[1] Henan Univ Sci & Technol, Sch Mat Sci & Engn, Henan, Peoples R China
[2] Henan Key Lab Adv Nonferrous Met, Luoyang, Peoples R China
[3] CITIC HEAVY IND CO LTD, Luoyang, Peoples R China
来源：
PHYSICAL AND NUMERICAL SIMULATION OF MATERIAL PROCESSING VI, PTS 1 AND 2 | 2012年 / 704-705卷
基金：
中国国家自然科学基金;
关键词：
diamond film; CVD; texture; Young's modulus; anisotropy; CHEMICAL-VAPOR-DEPOSITION; MICROWAVE PLASMA CVD; INTRINSIC STRESS; SURFACE;
D O I：
10.4028/www.scientific.net/MSF.704-705.1117
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
The relationship between textures and Young's modulus in CVD diamond films was simulated based on the phenomenological theory, which indicates the textures induce the Young's modulus anisotropy. The increase of methane concentration changes the density of different fiber textures in diamond films, which induces the increase of Young's modulus in the directions that parallel to the film surface. Among the textures, {111} texture is of no influence whereas {011} texture has the maximum influence on the Young's modulus anisotropy of diamond film.
引用
收藏
页码：1117 / +
页数：2
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