Multilayer X-ray interference mirrors in the ultrasoft X-ray region

被引：0
|
作者：
Lyakhovskaya, II [1 ]
Bugaev, EA [1 ]
机构：
[1] KHARKOV POLITECH INST,KHARKOV 310002,UKRAINE
来源：
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA | 1996年 / 80卷
关键词：
D O I：
10.1016/0368-2048(96)03015-0
中图分类号：
O433 [光谱学];
学科分类号：
0703 ; 070302 ;
摘要：
The angular dependences of reflection coefficients of ultrasoft X-Ray radiation by X-Ray interference mirrors were investigated for samples prepared by the method of magnetron sputtering. The theoretical evaluations of these reflection coefficients were compared with the obtained experimental results. The influence of thermal annealing is discussed.
引用
收藏
页码：457 / 459
页数：3
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