Light-bias interaction of zinc-tin oxide (ZTO) thin film transistor for charge-trapping memory application

被引:0
|
作者
Chen, Jen-Sue [1 ]
Li, Jeng-Ting [1 ]
Liu, Li-Chih [1 ]
Ke, Po-Hsien [1 ]
Jeng, Jiann-Shing [2 ]
机构
[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, 1 Univ Rd, Tainan 70101, Taiwan
[2] Natl Tainan Univ, Dept Mat Sci, 33,Sec 2,Shu Lin St, Tainan 70005, Taiwan
关键词
NONVOLATILE MEMORY;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we report the program-erase operation of a nonvolatile charge trapping memory base on a thin film transistor. The transistor is composed of an ultra-thin zinc tin oxide (ZTO) semiconductor layer and an Al2O3/Ni-nanocrystals/SiO2 dielectric stack. The threshold voltage (V-Th), sub-threshold swing, I-ON/I-OFF ratio of the as-fabricated device are 1.8 V, 0.40 V/decade and similar to 10(7), respectively. By applying a gate voltage of 40 V for 1s, the V-Th shifts positively and is named the programmed state. The programmed V-Th shift can be back-shifted by applying a gate voltage of -10 V with monochromatic light source of wavelengths (405, 532, 635 nm), the erasing is most effective at wavelength of 635 nm. Subsequently, it is found that the programmed state can be expediently erased by applying a gate voltage of -10 V with a visible light illumination for 1 s. Erasing process can also be done by visible light illumination only, but is not as efficient. The light-erasable memory can be integrated into low power consumption display devices owing to its light-sensing switching characteristics.
引用
收藏
页码:62 / 65
页数:4
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