Design and Performance Assessment of a 5-Axis Ultra-precision Micro-milling Machine

This paper presents the development and performance assessment of a novel 5-axis ultra-precision micro-milling machine (UltraMill) which enables ultra-precision micromachining of high precision 3D miniature components and micro features. An integrated design approach with motion accuracy, dynamic stiffness and thermal stability prioritized has been proposed and applied to analyze and optimize key machine components and their integration. Direct drives and aerostatic bearings with the squeeze oil-film damper are employed in the micro-milling machine throughout, which offers higher motion accuracy, improved dynamics and loading capacity. Micro-milling trials were performed on OFHC copper using tungsten carbide, CVD diamond and single crystal diamond micro tools. Both micro featured profiles and micro machined surfaces were measured to validate the proposed machine specifications and performance.