Adaptive interferometric null testing for unknown freeform optics metrology

被引：65
|
作者：
Huang, Lei [1 ,2 ]
Choi, Heejoo [2 ]
Zhao, Wenchuan [2 ,3 ]
Graves, Logan R. [2 ]
Kim, Dae Wook [2 ]
机构：
[1] Tsinghua Univ, Dept Precis Instruments, Ctr Photon & Elect, Beijing 100084, Peoples R China
[2] Univ Arizona, Coll Opt Sci, 1630 East Univ Blvd, Tucson, AZ 85721 USA
[3] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
来源：
OPTICS LETTERS | 2016年 / 41卷 / 23期
关键词：
COMPUTER-GENERATED HOLOGRAMS;
D O I：
10.1364/OL.41.005539
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We report an adaptive interferometric null testing method for overcoming the dynamic range limitations of conventional null testing approaches during unknown freeform optics metrology or optics manufacturing processes that require not-yet-completed surface measurements to guide the next fabrication process. In the presented adaptive method, a deformable mirror functions as an adaptable null component for an unknown optical surface. The optimal deformable mirror's shape is determined by the stochastic parallel gradient descent algorithm and controlled by a deflectometry system. An adaptive interferometric null testing setup was constructed, and its metrology data successfully demonstrated superb adaptive capability in measuring an unknown surface. (C) 2016 Optical Society of America
引用
收藏
页码：5539 / 5542
页数：4
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