Residual stresses nn single and multilayer composite diamond coatings

被引:0
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作者
Jagannadham, K
Watkins, TR
Narayan, J
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TB3 [工程材料学];
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0805 ; 080502 ;
摘要
Residual stresses were measured in different types of diamond coatings deposited onto molybdenum substrates by hot filament chemical vapor deposition. The types of coatings examined include a continuous single layer diamond coating and a continuous multilayer diamond composite coating with an aluminum nitride embedding layer. The stresses were determined by X-ray diffraction and Raman spectroscopy and compared.
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页码:459 / 464
页数:6
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