Characterization of flexible radio-frequency spiral inductors on a plastic substrate

被引：4

作者：

Qin, Guoxuan ^{[1
,5
]}

Liu, Hao ^{[1
]}

Xu, Yanmeng ^{[1
]}

Dang, Mengjiao ^{[1
]}

Ma, Jianguo ^{[1
]}

Ma, Zhenqiang ^{[4
]}

Chen, Xuejiao ^{[3
]}

Luo, Tao ^{[2
]}

机构：

[1] Tianjin Univ, Sch Elect Informat Engn, Tianjin 300072, Peoples R China

[2] Tianjin Univ, Tianjin Key Lab Cognit Comp & Applicat, Sch Comp Sci & Technol, Tianjin 300072, Peoples R China

[3] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China

[4] Univ Wisconsin, Dept Elect & Comp Engn, 1415 Johnson Dr, Madison, WI 53706 USA

[5] Tianjin Univ, Tianjin Key Lab Imaging & Sensing Microelect Tech, Tianjin 300072, Peoples R China

来源：

IEICE ELECTRONICS EXPRESS | 2016年 / 13卷 / 20期

基金：

中国国家自然科学基金;

关键词：

characterization; flexible; plastic substrate; quality factor; self-resonant frequency; spiral inductor; SILICON NANOMEMBRANES; ELECTRONICS; CMOS; PERFORMANCE; FABRICATION; CHIP;

D O I：

10.1587/elex.13.20160690

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the design and fabrication of flexible radio-frequency inductors integrated on a polyethylene terephthalate substrate. Experimental and modeling results for the RF responses of flexible inductors are reported. Investigations and analysis have been conducted on the effects of layout and process parameters on the frequency responses of inductance, quality factor and self-resonant frequency of the spiral inductors. The influence of bending strain on the performance of spiral inductors is also investigated based on measurement and modeling results. The analysis provides guidelines for designing the flexible spiral inductors towards the flexible monolithic microwave integrated circuits on a plastic substrate.

引用

页数：12

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