A proportional microvalve using a Bi-stable magnetic actuator

被引：39
|
作者：
Shinozawa, Y
Abe, T
Kondo, T
机构：
来源：
MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS | 1997年
关键词：
D O I：
10.1109/MEMSYS.1997.581809
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A simple electromagnetic miniature valve was fabricated using a combination of a micromachined coil and a permanent magnet. The dimension of the valve including the actuator is about 5x5x5 mm, and the valve has a 0.5 mm valve cap displacement which significantly alleviates the clogging problem by using a bi-stable actuation of the magnet. The smallest controllable amount of water was 0.7 mu 1/min, and flow rates through the valve less than 900 mu 1/min can be continuously adjusted by a duty ratio control of driving current to the micro coil.
引用
收藏
页码：233 / 237
页数：5
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