Fabrication of Thin-Film WO3 Sensors and Their Sensing Properties to Dilute NO2

被引：0
|
作者：
Meng, Zhicong [1 ,2 ]
Hashishin, Takeshi [3 ]
Tamaki, Jun [1 ]
Kojima, Kazuo [1 ]
机构：
[1] Ritsumeikan Univ, Coll Life Sci, Dept Appl Chem, 1-1-1 Noji Higashi, Kusatsu, Shiga 5258577, Japan
[2] Japan Soc Promot Sci, Chiyoda Ku, Tokyo 1028472, Japan
[3] Osaka Univ, Joining & Welding Res Inst, Ibaraki Shi, Mihogaoka, Osaka 5670047, Japan
来源：
2012 IEEE SENSORS PROCEEDINGS | 2012年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We tried to fabricate WO3 thin- film sensors using four kinds of WO3 particles with very different crystalline morphologies (spherical, disk, cuboid, and hexagonal). Using highly dispersive suspensions prepared, WO3 thin films of 1.5-3.0 mu m in mean thickness were obtained by micro-injecting film formation method. NO2 sensing properties of these thin- film sensors suggested that the sensitivity to NO2 as well as the rate of response-recovery depended markedly on morphology and microstructure of the WO3 crystals contained.
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页码：1064 / 1067
页数：4
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