Sensing characteristics of WO3 thin film as NO2 gas sensor

被引：0
|
作者：
He, XL [1 ]
Li, JP [1 ]
Gao, XG [1 ]
机构：
[1] Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
来源：
INTERNATIONAL CONFERENCE ON SENSOR TECHNOLOGY (ISTC 2001), PROCEEDINGS | 2001年 / 4414卷
关键词：
gas sensor; tungsten trioxide; nitrogen dioxide;
D O I：
10.1117/12.440189
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The WO3 thin films were prepared by magnetron sputtering method on the 3mmx3mm silicon substrates with Pt interdigitating electrodes and heater. The deposition and the operating temperatures were analyzed to optimize the technological parameters. The sensing properties of these films to NO2 gas were measured. The results indicate that the sensitivities are strongly dependent on the deposition and operating temperatures. The WO3 thin film deposited at 300 degreesC and then annealed in air at 600 degreesC for 4h shows the excellent sensing properties to NO2 gas at the operating temperature of 250 degreesC.
引用
收藏
页码：207 / 209
页数：3
相关论文
共 50 条
  • [1] NO2 sensing characteristics of WO3 thin film microgas sensor
    He, XL
    Li, JP
    Gao, XG
    Wang, L
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3) : 463 - 467
  • [2] WO3 thin film prepared by PECVD technique and its gas sensing properties to NO2
    Maosong Tong
    Guorui Dai
    Yuanda Wu
    Xiuli He
    Dingsan Gao
    [J]. Journal of Materials Science, 2001, 36 : 2535 - 2538
  • [3] WO3 thin film prepared by PECVD technique and its gas sensing properties to NO2
    Tong, MS
    Dai, GR
    Wu, YD
    He, XL
    Gao, DS
    [J]. JOURNAL OF MATERIALS SCIENCE, 2001, 36 (10) : 2535 - 2538
  • [4] Sensitivity properties of a novel NO2 gas sensor based on mesoporous WO3 thin film
    Teoh, LG
    Hon, YM
    Shieh, J
    Lai, WH
    Hon, MH
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2003, 96 (1-2) : 219 - 225
  • [5] High sensitivity semiconductor NO2 gas sensor based on mesoporous WO3 thin film
    Teoh, LG
    Hung, IM
    Shieh, J
    Lai, WH
    Hon, MH
    [J]. ELECTROCHEMICAL AND SOLID STATE LETTERS, 2003, 6 (08) : G108 - G111
  • [6] Chemical mechanical planarization characteristics of WO3 thin film for gas sensing
    Seo, YJ
    Kim, NH
    Chang, EG
    Park, J
    Ko, PJ
    Lee, WS
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2005, 23 (04): : 737 - 740
  • [7] Development of a Miniaturized NO2 Gas Sensor Based on Nanoparticles WO3 Thin Film on Interdigitated Electrodes
    Dao, Dzung Viet
    Li, Ling-Han
    Hashishin, Takeshi
    Tamaki, Jun
    Shibuya, Kyoji
    Sugiyama, Susumu
    [J]. 2010 IEEE SENSORS, 2010, : 1254 - 1257
  • [8] NO2 sensing properties of WO3 varistor-type gas sensor
    Hua, Zhongqiu
    Wang, Yu
    Wang, Haiqing
    Dong, Liang
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2010, 150 (02): : 588 - 593
  • [9] Preparation and Characterization of SnO2/WO3/MWCNT Nanocomposite Thin Film for NO2 Gas Sensor
    Lin Wei
    Huang Shizhen
    Chen Wenzhe
    [J]. MATERIALS AND MANUFACTURING TECHNOLOGY, PTS 1 AND 2, 2010, 129-131 : 99 - 103
  • [10] Gas sensing properties of WO3 thick film for NO2 gas dependent on process condition
    Chung, YK
    Kim, MH
    Um, WS
    Lee, HS
    Song, JK
    Choi, SC
    Yi, KM
    Lee, MJ
    Chung, KW
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1999, 60 (01) : 49 - 56
12345