The photolithographic and electric properties of photosensitive insulating materials as a passivation layer on TFT LCDs

被引：0
|
作者：
Nakamura, Shigeru [1 ]
Azuma, Kenichi [1 ]
Kusaka, Yasunari [1 ]
Unate, Takao [1 ]
Nakasuga, Akira [1 ]
Matsukawa, Kimihiro
Murakami, Shuichi
Ohkura, Kensaku
Kikkawa, Takamaro
机构：
[1] Sekisui Chem Co Ltd, Minase Res Labs, Shimamoto, Osaka 6188589, Japan
来源：
IDW/AD '05: PROCEEDINGS OF THE 12TH INTERNATIONAL DISPLAY WORKSHOPS IN CONJUNCTION WITH ASIA DISPLAY 2005, VOLS 1 AND 2 | 2005年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Novel photosensitive insulating materials comprised of organic silsesquioxane (OSQ) have been developed. The OSQ showed high photosensitivity, insulating performance, transparency, and heat resistance required as a passivation layer on TFT LCDs. We examined features on the photolithographic and electric properties. The higher photosensitivity and resolution were obtained by the improvement of the material composition of OSQ. And we discussed the further evaluation of the V-g-I-d and V-ds-I-d characteristics on TFT devices.
引用
收藏
页码：1299 / 1302
页数：4
相关论文
共 16 条
  • [1] The Photosensitive Insulating Materials as a Passivation Layer on a-Si TFT LCDs
    Lee, Liu-Chung
    Liang, Chung-Yu
    Pan, Hsin-Hua
    Huang, G. Y.
    Gan, Feng-Yuan
    [J]. IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS, 2006, : 695 - 698
  • [2] Development of photosensitive insulating materials as a planarization and passivation layer on TFT LCDs
    Kusaka, Yasunari
    Nakamura, Shigeru
    Azuma, Kenichi
    Sasaki, Taku
    Unate, Takao
    Nakatani, Yasuhiro
    Nakasuga, Akira
    Matsukawa, Kimihiro
    Murakami, Shuichi
    Ohkura, Kensaku
    Kikkawa, Takamaro
    [J]. IDW '06: PROCEEDINGS OF THE 13TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2006, : 969 - +
  • [3] Novel positive type photosensitive insulating materials by organic/inorganic hybrid technologies as a passivation layer on TFT LCDs
    Kusaka, Yasunari
    Nakamura, Shigeru
    Azuma, Kenichi
    Sasaki, Taku
    Unate, Takao
    Nakatani, Yasuhiro
    Nakasuga, Akira
    Matsukawa, Kimihiro
    Murakami, Shuichi
    Ohkura, Kensaku
    Kikkawa, Takamaro
    [J]. 2007 SID INTERNATIONAL SYMPOSIUM, DIGEST OF TECHNICAL PAPERS, VOL XXXVIII, BOOKS I AND II, 2007, 38 : 377 - +
  • [4] Solution-Processed Photosensitive Passivation Layer for an a-Si TFT for LCDs with a Low Dielectric Constant
    Tanabe, Akihiro
    Hanmura, Masahiro
    Katoh, Takeyoshi
    Oomori, Hironori
    Honma, Akira
    Suzuki, Teruhiko
    [J]. IEICE TRANSACTIONS ON ELECTRONICS, 2012, E95C (11) : 1737 - 1743
  • [5] High reliability of Oxide TFT Using Solution-Processed Photosensitive Passivation Layer
    Tanabe, Akihiro
    Kojiri, Takashi
    Hanmura, Masahiro
    [J]. IDW/AD '12: PROCEEDINGS OF THE INTERNATIONAL DISPLAY WORKSHOPS, PT 2, 2012, 19 : 969 - 971
  • [6] Photolithographic properties of photosensitive sol-gel materials and their application to optical waveguides
    Tamaki, K
    Utaka, T
    Takase, H
    Eriyama, Y
    Ukachi, T
    [J]. JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2002, 15 (01) : 103 - 108
  • [7] High reliability of a-Si TFT Using Solution-Processed Photosensitive Passivation Layer with Low Dielectric Constant
    Tanabe, Akihiro
    Hanmura, Masahiro
    Katoh, Takeyoshi
    Tada, Mitsushi
    [J]. IDW'11: PROCEEDINGS OF THE 18TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2011, : 669 - 672
  • [8] Hygroscopic Properties of Electric Insulating Pulp Materials Impregnated with Transformer Oil.
    Kasper, V.I.
    Dmitrieva, N.V.
    [J]. Izvestiya Vysshikh Uchebnykh Zavedenij i Energeticheskikh Ob''edinenij Sng. Energetika, 1976, (09): : 31 - 36
  • [9] Effect of Aspect Ratio and Water Contamination on the Electric Properties of Nanostructured Insulating Materials
    Fabiani, Davide
    Montanari, Gian Carlo
    Testa, Luigi
    [J]. IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION, 2010, 17 (01) : 221 - 230
  • [10] The influence of Thermal properties of Materials on Electric Insulating Systems of Air-cooled Turbogenerators
    Tomaskova, T.
    Trnka, P.
    [J]. 2015 5TH INTERNATIONAL YOUTH CONFERENCE ON ENERGY (IYCE), 2015,
12