A MEMS X-type Plane Micro-cantilever Stiffness Research

被引：0
|
作者：
Liu, Fengli [1 ]
Hao, Yongping [1 ]
Wang, Xing [1 ]
Xu, Mahui [1 ]
机构：
[1] Shenyang Li gong Univ, CAD CAM Tech Res & Dev Ctr, Shenyang, Liaoning Provin, Peoples R China
来源：
2014 11TH WORLD CONGRESS ON INTELLIGENT CONTROL AND AUTOMATION (WCICA) | 2014年
关键词：
micro-cantilever; MEMS; elasticity coefficient; finite element;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The closed X-type micro-electromechanical systems (MEMS) cantilever was designed and the mechanical analysis model was established, the coefficient of elasticity of the cantilever was derived by using the card's second of energy method law and Hooke's law. The relative error in the ANSYS finite element simulation did not beyond the allowable range. The spring constant were researched by changing cantilever's various structural parameters in the linear range. The study results provide a theoretical basis for the design and optimization of other closed type of plane micro cantilever.
引用
收藏
页码：3351 / 3354
页数：4
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