Fabrication of Photonic Crystal based Back-reflectors for Light Management and Enhanced Absorption in Amorphous Silicon Solar Cells

Photonic crystal based back-reflectors are an attractive solution for light management and enhancing optical absorption in thin film solar cells, without undesirable losses. We have fabricated prototype photonic crystal back-reflectors using photolithographic methods and reactive-ion etching. The photonic crystal back-reflector has a triangular lattice symmetry, a thickness of 250 nm, and a pitch of 765 nm. Scanning electron microscopy images demonstrate high quality long range periodicity. An a-Si: H solar cell device was grown on this back-reflector using standard PECVD techniques. Measurements demonstrate strong diffraction of light and high diffuse reflectance by the photonic crystal back-reflector. The photonic crystal back-reflector increases the average photon collection by similar to 9% in terms of normalized external quantum efficiency, relative to a reference device on a stainless steel substrate with an Ag coated back surface.