Study on Effect of van der Waals Force and Casimir Force to Microsystem

被引：2
|
作者：
Guan, Yanwei [1 ]
Gao, Shiqiao [1 ]
Shen, Li [1 ]
He, Yunli [1 ]
机构：
[1] Beijing Inst Technol, State Key Lab Explos Sci & Technol, Beijing 100081, Peoples R China
来源：
INDUSTRIAL INSTRUMENTATION AND CONTROL SYSTEMS II, PTS 1-3 | 2013年 / 336-338卷
关键词：
van der Waals force; Casimir force;
D O I：
10.4028/www.scientific.net/AMM.336-338.944
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Based on the electrostatic comb drive structure, the comb will do relative motionwhen it is driven up,and the space between them will be less than 1 mu m. Considering the micro-scale effect, the Van der Waals force and the Casimir force is usedto analyze the influence on the micro-structure, compared with theelectrostatic force.Thevan der Waals force and theCasimir force is almost equivalent to the electrostatic forcewhen the initial gapof the micro-structure and the relative displacement between the micro-structureis relatively small.Therefore the van der Waals force and the Casimir force playan important role in the micro-structure and cannot be ignored.
引用
收藏
页码：944 / 948
页数：5
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