Study on Effect of van der Waals Force and Casimir Force to Microsystem

Based on the electrostatic comb drive structure, the comb will do relative motionwhen it is driven up,and the space between them will be less than 1 mu m. Considering the micro-scale effect, the Van der Waals force and the Casimir force is usedto analyze the influence on the micro-structure, compared with theelectrostatic force.Thevan der Waals force and theCasimir force is almost equivalent to the electrostatic forcewhen the initial gapof the micro-structure and the relative displacement between the micro-structureis relatively small.Therefore the van der Waals force and the Casimir force playan important role in the micro-structure and cannot be ignored.