共 50 条
- [42] Extreme ultraviolet microscope characterization using photomask surface roughness Scientific Reports, 10
- [43] Amplitude and spatial frequency characterization of line edge roughness using AFM Nami Jishu yu Jingmi Gongcheng, 2008, 5 (367-371):
- [47] Geometric search technique for surface roughness evaluation using machine vision MEASURE AND QUALITY CONTROL IN PRODUCTION, 2004, 1860 : 93 - 100
- [48] OPTICAL SURFACE-ROUGHNESS DETERMINATION USING SPECKLE CORRELATION TECHNIQUE APPLIED OPTICS, 1975, 14 (04): : 872 - 877
- [49] Technique to analyze large area surface roughness of a wafer using TXRF IN-LINE CHARACTERIZATION TECHNIQUES FOR PERFORMANCE AND YIELD ENHANCEMENT IN MICROELECTRONIC MANUFACTURING II, 1998, 3509 : 228 - 234
- [50] Field surface roughness levelling of the lapping metal surface using specular white light The International Journal of Advanced Manufacturing Technology, 2022, 119 : 2895 - 2909