Optical characterization of silicon carbide polytypes

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作者
Devaty, RP
Choyke, WJ
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D O I
10.1002/1521-396X(199707)162:1<5::AID-PSSA5>3.3.CO;2-A
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This article is a review of recent progress in our understanding of the optical properties of the important polytypes of SiC: 3C, 4H, GH, and 15R. We focus or. experimental work hut also compare results obtained by experiment with theory. The topics of emphasis are: 1. vacuum ultraviolet reflectivity, 2. free excitons, 3. spectroscopy of shallow donors and acceptors; 4. she impurity boron in SiC; 5. the rare earth impurity erbium in SiC, and 6. optical properties of porous SiC.
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页码:5 / 38
页数:34
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