This work demonstrates the viability of pilus as a new biological substrate through the growth of Al2O3 by atomic layer deposition. In order to best realize the implementation potential of these new processing capabilities, materials processing by ALD on 3D biological pili templates were explored. The shape and size can be exactly determined by the biological template in a wide variety of shapes and sizes.. In order to get the pili as a substrate, the bacteria E. Coli were cultured and detached using a blending process. The optimal deposition temperature and cycle times were obtained for Al2O3 on the pili by ALD at 25 cycles, 100 degrees C. TEM and electron diffraction were used to characterize the morphology and structure of the nanofibers after ALD deposition.