Long-term outlook for MEMS: New applications and markets

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作者：
Jeromski, G
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来源：
SOLID STATE TECHNOLOGY | 1999年 / 42卷 / 07期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：62 / +
页数：4
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