Transparent conducting zinc oxide thin film prepared by off-axis rf magnetron sputtering

被引：98
|
作者：
Jayaraj, MK [1 ]
Antony, A [1 ]
Ramachandran, M [1 ]
机构：
[1] Cochin Univ Sci & Technol, Dept Phys, Kochi 682022, Kerala, India
来源：
BULLETIN OF MATERIALS SCIENCE | 2002年 / 25卷 / 03期
关键词：
transparent conductors; ZnO thin films; photovoltaics;
D O I：
10.1007/BF02711158
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Highly conducting and transparent ZnO : Al thin films were grown by off-axis rf magnetron sputtering on amorphous silica substrates without any post-deposition annealing. The electrical and optical properties of the films deposited at various substrate temperatures and target to substrate distances were investigated in detail. Optimized ZnO : Al films have conductivity of 2200 S cm(-1) and average transmission in the visible range is higher than 85%. The conductivity and mobility show very little temperature dependence.
引用
收藏
页码：227 / 230
页数：4
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