Application of astigmatic method and snell's law on the thickness and refractive index measurement of a transparent plate

被引：5
|
作者：
Liu, Chien-Hung [1 ]
Liu, Chin-Chia [2 ]
Huang, Wei-Chuan [1 ]
机构：
[1] Natl Chung Hsing Univ, Dept Mech Engn, Taichung 40227, Taiwan
[2] Natl Changhua Univ Educ, Dept Ind Educ & Technol, Changhua, Taiwan
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2013年 / 19卷 / 11期
关键词：
LOW-COHERENCE INTERFEROMETRY; FILM MEASUREMENTS; CONFOCAL OPTICS; ELLIPSOMETRY; REFLECTOMETRY; SYSTEM; BEAM;
D O I：
10.1007/s00542-013-1831-y
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this study, a thickness and refractive index measuring system for the transparent plate has been proposed. The measuring system is composed of an astigmatic measurement module and a light spot measurement module using a DVD optical pickup, a laser diode and a quadrant photodiode detector. Both of the thickness and refractive index of a transparent plate are converted into the focusing error of DVD pickup based on astigmatic method and the light spot displacements based on snell's law in our proposed system. The thickness and the refractive index are simultaneously calculated by means of two nonlinear formulas. The accuracy of the proposed system is 99 % verified by a height Gauge and the refractive index by the TF-166.
引用
收藏
页码：1761 / 1766
页数：6
相关论文
共 50 条
  • [41] Simultaneous measurement of refractive index and thickness for optically transparent object with a dual-wavelength quantitative technique
    Xu, Xiaoqing
    Wang, Yawei
    Xu, Yuanyuan
    Jin, Weifeng
    OPTICA APPLICATA, 2016, 46 (04) : 597 - 605
  • [42] Measurement of the refractive index and thickness of a transparent film from the shift of the interference pattern due to the sample rotation
    Santic, B.
    THIN SOLID FILMS, 2010, 518 (14) : 3619 - 3624
  • [43] Simultaneous Measurement of Thickness and Refractive Index of Transparent Material Using a Collimated Beam Having a Finite Radius
    Park, Dae-Seo
    Beom-Hoan, O.
    Park, Se-Geun
    Lee, El-Hang
    Lee, Seung Gol
    KOREAN JOURNAL OF OPTICS AND PHOTONICS, 2009, 20 (01) : 29 - 33
  • [44] Study and application on transparent plate thickness measurement based on laser triangulation with light compensation
    Yang, Guishuan
    Chen, Tao
    Zhang, Zhifeng
    Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 42 (07):
  • [45] Interference method for determination of the refractive index and thickness
    Alexandrov, SA
    Chernyh, IV
    OPTICAL ENGINEERING, 2000, 39 (09) : 2480 - 2486
  • [46] Application of Snell's law in weakly anisotropic media
    Vanelle, Claudia
    Gajewski, Dirk
    GEOPHYSICS, 2009, 74 (05) : WB147 - WB152
  • [47] Simultaneous Measurement of Refractive Index and Thickness with a Convergent Beam
    Hii, King Ung
    Kwek, Kuan Hiang
    OPTICAL REVIEW, 2014, 21 (05) : 705 - 708
  • [48] MEASUREMENT OF THICKNESS AND REFRACTIVE INDEX OF OXIDE FILMS ON SILICON
    BOOKER, GR
    BENJAMIN, CE
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (12) : 1206 - 1212
  • [49] Simultaneous measurement of refractive index and thickness with a convergent beam
    King Ung Hii
    Kuan Hiang Kwek
    Optical Review, 2014, 21 : 705 - 708
  • [50] Measurement of the refractive index and thickness for lens by confocal technique
    Wang, Yun
    Qiu, Lirong
    Yang, Jiamiao
    Zhao, Weiqian
    OPTIK, 2013, 124 (17): : 2825 - 2828
12345