Polarization phase shifting lateral shearing interferometer

被引:1
|
作者
Liu, Lei [1 ]
Zeng, Aijun [1 ]
Zhu, Linglin [1 ]
Song, Qiang [1 ]
Huang, Huijie [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
基金
对外科技合作项目(国际科技项目);
关键词
Lateral shearing; Interferometer; Phase shifting; Polarization; EXTRACTION;
D O I
10.1117/12.2033009
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A polarization phase shifting lateral shearing interferometer based on a polarization beam splitting plate(PBSP) is proposed. The front surface of the PBSP is coated with polarization beam splitting film and its back surface is coated with total reflection film. The beam to be tested is split by the PBSP with an incidence angle of 45 and divided into two mutually perpendicular linearly polarization beams. Phase shifting can be introduced to the interferometer when the PBSP is combined with a polarzation temporal or spatial phase shifter. A polarizaiton temporal phase shifting lateral shearing interferometer system is built up both with the ASAP software and the experiments. The usefulness of the interferometer is verified.
引用
收藏
页数:7
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