Kinetics of oxygen surfactant in Cu(001) homoepitaxial growth

被引:22
|
作者
Yata, M
Rouch, H
Nakamura, K
机构
[1] First Research Group, National Research Institute for Metals, Sengen
来源
PHYSICAL REVIEW B | 1997年 / 56卷 / 16期
关键词
D O I
10.1103/PhysRevB.56.10579
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
It is found that O atoms segregate to the surface during Cu homoepitaxial growth on Cu(001)-(2 root 2 x root 2)-O to retain the (2 root 2 X root 2) surface. The presence of an O adlayer on the Cu surface raises the barrier height for the surface diffusion of the Cu adatom and increases the transition temperature of the growth mode from step flow to layer by layer. The rate-determining step for the growth is the site exchange between O atoms and Cu adatoms. There exists a critical Cu deposition rate R-c, above which the O atoms cannot exchange the site with Cu adatoms during growth. R-c obeys an Arrhenius relation. The activation energy for the site exchange is estimated at 0.66 eV. [S0163-1829(97)06940-3].
引用
收藏
页码:10579 / 10584
页数:6
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