Mid-infrared InAs/InAsSb Type-II superlattices grown on silicon by MOCVD

被引:2
|
作者
Brown, Richard [1 ]
Ratiu, Bogdan Petrin [1 ]
Jia, Hui [2 ]
Azizur-Rahman, Khalifa M. [3 ]
Dang, Manyu [2 ]
Tang, Mingchu [2 ]
Liang, Baolai [3 ]
Liu, Huiyun [2 ]
Li, Qiang [1 ]
机构
[1] Cardiff Univ, Sch Phys & Astron, Cardiff CF24 3AA, Wales
[2] UCL, Dept Elect & Elect Engn, London WC1E 7JE, England
[3] Univ Calif Los Angeles, Calif Nanosyst Inst, Los Angeles, CA 90095 USA
基金
英国工程与自然科学研究理事会;
关键词
Metalorganic chemical vapor deposition; Antimonides; Type-II superlattice; III/V on Silicon; Interfacial Misfit Array; Infrared devices; INAS/GASB;
D O I
10.1016/j.jcrysgro.2022.126860
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In this work we report the growth of the InAs/InAsSb type-II superlattice (T2SL) onto Si substrates via the use of a GaSb/GaAs/Si buffer layer structure all grown by MOCVD. Transmission electron microscopy (TEM) was used to show the effectiveness of the buffer layer structure in reducing threading dislocation density and to verify the formation of an interfacial misfit dislocation array between the GaSb and GaAs layers. Electron channelling contrast imaging was used to measure a threading dislocation density of 6.73 x 10(8)/cm(2) at the surface of the T2SL. TEM and X-ray diffraction show that the T2SL itself was grown to a high quality considering the large mismatch of the heteroepitaxy. Fourier transform infrared spectroscopy was used to measure the photo-luminescence performance of the T2SL which was found to have a FWHM of 50 meV at a peak wavelength of 4.5 mu m at 77 K. These results are a step forward towards integration of full InAs/InAsSb T2SL device structures onto Si substrates via MOCVD.
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页数:5
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