Multifunctional X-ray lithography station at VEPP-3

被引：14
|
作者：
Goldenberg, B. G. [1 ]
Lemzyakov, A. G. [1 ]
Nazmov, V. P. [1 ]
Pindyurin, V. F. [1 ]
机构：
[1] Budker Inst Nucl Phys, Lavrenteva Av 11, Novosibirsk, Russia
来源：
PROCEEDINGS OF THE INTERNATIONAL CONFERENCE SYNCHROTRON AND FREE ELECTRON LASER RADIATION: GENERATION AND APPLICATION (SFR-2016) | 2016年 / 84卷
基金：
俄罗斯科学基金会;
关键词：
deep X-ray lithography; X-ray mask; central beamstop; X-ray Lithographer; SYNCHROTRON-RADIATION; SIBERIAN SYNCHROTRON; TERAHERTZ RADIATION; FABRICATION; MASKS;
D O I：
10.1016/j.phpro.2016.11.036
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The multifunctional X-ray lithography "LIGA" station on beamline 0 at the VEPP-3 synchrotron source is part of the shared-use center "Siberian Synchrotron and Terahertz Radiation Center" (SSTRC) in Budker Institute of Nuclear Physics (BINP, Novosibirsk, Russia). The station is intended to exposure of resist layers on substrates of different shape and lateral dimensions of 1 to 10 cm. The development of process and re-equipment of the station goes forward, continuously. In this work we consider the current capabilities of the station; examples of microstructures fabricated are presented. (C) 2016 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).
引用
收藏
页码：205 / 212
页数：8
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