X-RAY-LITHOGRAPHY AT THE VEPP-3 STORAGE RING

被引：14
|
作者：
ARTAMONOVA, LD [1 ]
GENTSELEV, AN [1 ]
DEIS, GA [1 ]
KRASNOPEROVA, AA [1 ]
MIKHALYOV, EV [1 ]
PROKOPENKO, VS [1 ]
KULIPANOV, GN [1 ]
MEZENTSEVA, LA [1 ]
PINDYURIN, VF [1 ]
机构：
[1] INST NUCL PHYS,NOVOSIBIRSK 630090,USSR
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期
关键词：
D O I：
10.1063/1.1142656
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The paper deals with an x-ray lithography station at the VEPP-3 storage ring of the Institute of Nuclear Physics (Novosibirsk) and some recent results are reported. The utilization of rather high quantum energies is shown not to deteriorate the quality of x-ray replication. The presented work is an extension of the studies that were performed at VEPP-2M [E. S. Gluskin, A. A. Krasnopyorova, G. N. Kulipanov, V. P. Naz'mov, V. F. Pindyurin, A. N. Skrinsky, and V. V. Chesnokov, Nucl. Instrum. Methods 208, 393 (1983)].
引用
收藏
页码：764 / 766
页数：3
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