Room temperature pulsed laser deposited ZnO thin films as photoluminiscence gas sensors

被引：29
|
作者：
Padilla-Rueda, D. [1 ]
Vadillo, J. M. [1 ]
Laserna, J. J. [1 ]
机构：
[1] Univ Malaga, Fac Sci, Dept Analyt Chem, E-29071 Malaga, Spain
来源：
APPLIED SURFACE SCIENCE | 2012年 / 259卷
关键词：
PLD; ZnO film; Pulsed laser deposition; Room temperature films; Opto-sensor NO2; OXYGEN-PRESSURE; GROWTH; VACUUM;
D O I：
10.1016/j.apsusc.2012.07.128
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Zinc oxide thin films with optical sensing capabilities for NO2 have been elaborated by pulsed laser deposition (PLD) onto glass substrates at room temperature with Nd:YAG laser (1064 nm). Morphology, chemical composition and optical characteristics of the films were evaluated as a function of laser fluence, gas pressure and target-to-substrate distance. Films exhibit excellent morphological and optical (transmittance and photoluminescence) properties. The films have been evaluated as fluorescence sensors for NO2 in the concentration range between 26 and 200 ppm. (C) 2012 Elsevier B. V. All rights reserved.
引用
收藏
页码：806 / 810
页数：5
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