Effects of Hydrogen Plasma Treatment on Field-Emission Characteristics of Palladium Nanogap Emitters

被引：6

作者：

Tsai, Chih-Hao ^{[1
]}

Chen, Kuan-Jung ^{[1
]}

Pan, Fu-Ming ^{[1
]}

Lo, Hsiang-Yu ^{[2
]}

Li, Yiming ^{[2
]}

Chiang, Mei-Chao ^{[3
]}

Mo, Chi-Neng ^{[3
]}

机构：

[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan

[2] Natl Chiao Tung Univ, Dept Commun Engn, Hsinchu, Taiwan

[3] Chunghwa Picture Tubes Ltd, Tao Yuan, Taiwan

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 2008年 / 155卷 / 12期

关键词：

D O I：

10.1149/1.2988646

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Nanogaps were prepared on the Pd line electrode by focused ion beam, and electron field-emission characteristics of the Pd nanogap emitter subject to hydrogen plasma treatment were studied. The as-prepared nanogap had smooth and uniform gap edges, and thus field-emission characteristics of the nanogap emitter were primarily dependent on the gap separation. After the hydrogen plasma treatment, the field-emission property of the Pd nanogap emitter was significantly enhanced. The improvement in the field-emission property was mainly attributed to formation of a ragged morphology on the nanogap emitter during the hydrogen plasma treatment. The ragged morphology provided more emitting sites with a high field enhancement factor. The Fowler-Nordheim plot was used to elucidate the dependence of field-emission characteristics of the Pd nanogap emitter on the plasma-induced ragged morphology. (C) 2008 The Electrochemical Society. [DOI: 10.1149/1.2988646] All rights reserved.

引用

页码：J361 / J364

页数：4

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