Frequency-dependent dynamic behaviour in piezoresponse force microscopy (PFM) implemented on a beam-deflection atomic force microscope (AFM) is analysed using a combination of modelling and experimental measurements. The PFM signal is comprised of contributions from local electrostatic forces acting on the tip, distributed forces acting on the cantilever, and three components of the electromechanical response vector. These interactions result in the flexural and torsional oscillations of the cantilever, detected as vertical and lateral PFM signals. The relative magnitudes of these contributions depend on geometric parameters of the system, on the stiffnesses and frictional forces of the tip-surface junction, and on the frequency of operation. The dynamic signal formation mechanism in PFM is analysed and conditions for optimal PFM imaging are formulated. An experimental approach for probing cantilever dynamics using frequency-bias spectroscopy and deconvolution of electromechanical and electrostatic contrast is implemented.
机构:
Oak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA
Oak Ridge Natl Lab, Ctr Nanophase Mat Sci, Oak Ridge, TN 37831 USAOak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA
Kalinin, Sergei V.
Rodriguez, Brian J.
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Oak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA
Oak Ridge Natl Lab, Ctr Nanophase Mat Sci, Oak Ridge, TN 37831 USAOak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA
Rodriguez, Brian J.
Kim, Seung-Hyun
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INOSTEK Inc, Gyeonggi 426901, South KoreaOak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA
Kim, Seung-Hyun
Hong, Suk-Kyoung
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Hynix Semicond Inc, Incheon Si 467701, Kyoungki Do, South KoreaOak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA
Hong, Suk-Kyoung
Gruverman, Alexei
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Univ Nebraska, Dept Phys & Astron, Lincoln, NE 68588 USAOak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA
Gruverman, Alexei
Eliseev, Eugene A.
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Natl Acad Sci Ukraine, Inst Problems Mat Sci, UA-03142 Kiev, UkraineOak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA
机构:
Faculty of Physics, Southern Federal University, Rostov-on-Don
Research Institute of Physics, Southern Federal University, Rostov-on-DonFaculty of Physics, Southern Federal University, Rostov-on-Don
Bunin M.A.
Rybyanets A.N.
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Research Institute of Physics, Southern Federal University, Rostov-on-DonFaculty of Physics, Southern Federal University, Rostov-on-Don
Rybyanets A.N.
Fedorovskiy A.E.
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Faculty of Physics, Southern Federal University, Rostov-on-DonFaculty of Physics, Southern Federal University, Rostov-on-Don
Fedorovskiy A.E.
Sukhomlinov D.I.
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Faculty of Physics, Southern Federal University, Rostov-on-DonFaculty of Physics, Southern Federal University, Rostov-on-Don
Sukhomlinov D.I.
Bunina O.A.
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Research Institute of Physics, Southern Federal University, Rostov-on-DonFaculty of Physics, Southern Federal University, Rostov-on-Don