Creation of design algorithm of working elements of micromechanical gyroscopes

被引：0
|
作者：
Lobur, Mykhaylo [1 ]
Holovatyy, Andriy [1 ]
机构：
[1] Lviv Polytech Natl Univ, Dept CAD Syst, 12 S Bandery Str, UA-79013 Lvov, Ukraine
来源：
PERSPECTIVE TECHNOLOGIES AND METHODS IN MEMS DESIGN | 2008年
关键词：
MEMS (MicroElectroMechanical Systems); inertial sensors; MEMS two-mass tuning fork gyroscope; working element; constructive parameters; angular velocity; design algorithm;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, the mathematical model of vibrations of the micromechanical gyroscope and the design algorithm of the constructive parameters of its working elements are proposed.
引用
收藏
页码：49 / +
页数：2
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