Towards Roll-to-Roll Deposition of High Quality Moisture Barrier Films on Polymers by Atmospheric Pressure Plasma Assisted Process

被引：57
|
作者：
Starostin, Sergey A. [1 ]
Creatore, Mariadriana [2 ]
Bouwstra, Jan B. [3 ]
van de Sanden, Mauritius C. M. [1 ,2 ]
de Vries, Hindrik W. [1 ]
机构：
[1] Dutch Inst Fundamental Energy Res DIFFER, NL-3430 BE Nieuwegein, Netherlands
[2] Eindhoven Univ Technol, Plasma & Mat Proc Grp, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands
[3] FUJIFILM Mfg Europe BV, Tilburg, Netherlands
来源：
PLASMA PROCESSES AND POLYMERS | 2015年 / 12卷 / 06期
关键词：
atmospheric pressure glow discharges (APGD); dielectric barrier discharges; gas diffusion barrier films; roll-to-roll reactors; water-vapour permeability; CHEMICAL-VAPOR-DEPOSITION; SIO2-LIKE FILMS; THIN-FILMS; DISCHARGE; COATINGS; LAYERS; TEMPERATURE; SMOOTH; CVD;
D O I：
10.1002/ppap.201400194
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An atmospheric pressure dielectric barrier discharge (DBD) was applied for the deposition of silica-like moisture barrier films on polyethylene 2,6 naphthalate foil. The diffuse plasma was sustained between two cylindrical drum electrodes in N-2/O-2/Ar gas flow with the addition of tetraethyl orthosilicate. The chemical composition, morphology and water vapour transmission rate of the moisture permeation barrier layers were studied as a function of the dynamic deposition rate and substrate temperature. It was demonstrated that dense silica-like layers of 100 nm thick with a good permeation barrier of approximate to 1.8 x 10(-3) g.m(-2).day (at 40 degrees C, 90% RH), corresponding to three orders of magnitude barrier improvement with respect to the pristine polymer, can be deposited in an atmospheric pressure process.
引用
收藏
页码：545 / 554
页数：10
相关论文
共 50 条
  • [31] Tension-controlled single-crystallization of copper foils for roll-to-roll synthesis of high-quality graphene films
    Jo, Insu
    Park, Subeom
    Kim, Dongjin
    Moon, Jin San
    Park, Won Bae
    Kim, Tae Hyeong
    Kang, Jin Hyoun
    Lee, Wonbae
    Kim, Youngsoo
    Lee, Dong Nyung
    Cho, Sung-Pyo
    Choi, Hyunchul
    Kang, Inbyeong
    Park, Jong Hyun
    Lee, Jeong Soo
    Hong, Byung Hee
    2D MATERIALS, 2018, 5 (02):
  • [32] Adhesive Hybrid SiO2.01C0.23Hx Nanoparticulate Coating on Polyethylene (PE) Separator by Roll-to-Roll Atmospheric Pressure Plasma
    Jin, Yichao
    Wang, Chaoliang
    Yuan, Nana
    Ding, Ke
    Xu, Yu
    Qin, Sicheng
    Wang, Ming
    Wu, Zhuangchun
    Du, Chengran
    Shi, Jianjun
    Zhang, Jing
    COATINGS, 2019, 9 (03):
  • [33] On effectiveness factor during roll-to-roll transfer process for graphene in horizontal low pressure chemical vapor deposition annular plug flow reactor
    Sharma, Kal Renganathan
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2014, 247
  • [34] Barrier ribs for plasma display panel by UV-assisted roll forming process
    Ryu, S. M.
    Kim, D. J.
    Yang, D. Y.
    Park, L. S.
    IDW '07: PROCEEDINGS OF THE 14TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2007, : 819 - +
  • [35] Atmospheric pressure plasma-jet treatment of polyacrylonitrile-nonwovens-Stabilization and roll-to-roll processing (vol 139, e52887, 2022)
    Hoffmann, A.
    Rohrbach, F.
    Uhl, M.
    Ceblin, M.
    Bauer, T.
    Mallah, M.
    Jacob, T.
    Heuermann, H.
    Kuehne, A. J. C.
    JOURNAL OF APPLIED POLYMER SCIENCE, 2023, 140 (48)
  • [36] Deposition of transparent and conductive ZnO films by an atmospheric pressure plasma-jet-assisted process
    Hsu, C. M.
    Lien, S. T.
    Yang, Y. J.
    Chen, J. Z.
    Cheng, I. C.
    Hsu, C. C.
    THIN SOLID FILMS, 2014, 570 : 423 - 428
  • [37] Roll to roll atmospheric pressure plasma enhanced CVD of titania as a step towards the realisation of large area perovskite solar cell technology
    Hodgkinson, J. L.
    Yates, H. M.
    Walter, A.
    Sacchetto, D.
    Moon, S. -J.
    Nicolay, S.
    JOURNAL OF MATERIALS CHEMISTRY C, 2018, 6 (08) : 1988 - 1995
  • [38] Glancing angle deposition on a roll: Towards high-throughput nanostructured thin films
    Krause, Kathleen M.
    Taschuk, Michael T.
    Brett, Michael J.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2013, 31 (03):
  • [39] Large-area open air plasma sources for roll-to-roll manufacture High-power density surface plasma generated by diffuse coplanar surface barrier discharge
    Homola, Tomas
    Kelar, Jakub
    Cernak, Mirko
    Kovacik, Dusan
    VAKUUM IN FORSCHUNG UND PRAXIS, 2022, 34 (04) : 21 - 25
  • [40] Continuous roll-to-roll fabrication of organic photovoltaic cells via interconnected high-vacuum and low-pressure organic vapor phase deposition systems
    Qu, Boning
    Forrest, Stephen R.
    APPLIED PHYSICS LETTERS, 2018, 113 (05)
12345