Design of a Miniature 3-DOF Flexure-Based Mechanism for Micro/Nano Manipulation

被引：0
|
作者：
Clark, L. [1 ]
Bhagat, U. [1 ]
Shirinzadeh, B. [1 ]
Chea, P. [1 ]
Qin, Y. [2 ]
Tian, Y. [2 ]
机构：
[1] Monash Univ, Dept Mech & Aerosp Engn, Robot & Mechatron Res Lab, Clayton, Vic 3800, Australia
[2] Tianjin Univ, Sch Mech Engn, Tianjin, Peoples R China
来源：
2012 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) | 2012年
基金：
澳大利亚研究理事会;
关键词：
flexure mechanism; pseudo-rigid body model; micro/nano manipulation; STAGE;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The work presented in this paper focuses on the design of a novel flexure-based mechanism capable of delivering planar motion with three degrees of freedom (3-DOF). Pseudo rigid body modeling (PRBM) and kinematic analysis of the mechanism are used to predict the motion of the mechanism in the X-, Y- and theta- directions. Lever based amplification is used to enhance the displacement of the mechanism. The presented design is small and compact in size (about 142mm by 110mm). The presented 3-DOF flexure-based miniature micro/nano mechanism delivers smooth motion in X, Y and theta, with maximum displacements of 142.09 mu m in X-direction, 120.36 mu m in Y-direction and 6.026 mrad in theta-rotation.
引用
收藏
页码：210 / 215
页数：6
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