Design of a Miniature 3-DOF Flexure-Based Mechanism for Micro/Nano Manipulation

被引：0
|
作者：
Clark, L. [1 ]
Bhagat, U. [1 ]
Shirinzadeh, B. [1 ]
Chea, P. [1 ]
Qin, Y. [2 ]
Tian, Y. [2 ]
机构：
[1] Monash Univ, Dept Mech & Aerosp Engn, Robot & Mechatron Res Lab, Clayton, Vic 3800, Australia
[2] Tianjin Univ, Sch Mech Engn, Tianjin, Peoples R China
来源：
2012 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) | 2012年
基金：
澳大利亚研究理事会;
关键词：
flexure mechanism; pseudo-rigid body model; micro/nano manipulation; STAGE;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The work presented in this paper focuses on the design of a novel flexure-based mechanism capable of delivering planar motion with three degrees of freedom (3-DOF). Pseudo rigid body modeling (PRBM) and kinematic analysis of the mechanism are used to predict the motion of the mechanism in the X-, Y- and theta- directions. Lever based amplification is used to enhance the displacement of the mechanism. The presented design is small and compact in size (about 142mm by 110mm). The presented 3-DOF flexure-based miniature micro/nano mechanism delivers smooth motion in X, Y and theta, with maximum displacements of 142.09 mu m in X-direction, 120.36 mu m in Y-direction and 6.026 mrad in theta-rotation.
引用
收藏
页码：210 / 215
页数：6
相关论文
共 50 条
  • [1] Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation
    Tian, Y.
    Shirinzadeh, B.
    Zhang, D.
    MICROELECTRONIC ENGINEERING, 2010, 87 (02) : 230 - 241
  • [2] Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning
    Guo, Z.
    Tian, Y.
    Liu, C.
    Wang, F.
    Liu, X.
    Shirinzadeh, B.
    Zhang, D.
    ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING, 2015, 32 : 93 - 105
  • [3] Design and analysis of a novel flexure-based 3-DOF mechanism
    Bhagat, Umesh
    Shirinzadeh, Bijan
    Clark, Leon
    Chea, Peter
    Qin, Yanding
    Tian, Yanling
    Zhang, Dawei
    MECHANISM AND MACHINE THEORY, 2014, 74 : 173 - 187
  • [4] Initial design and prototype of a flexure-based parallel mechanism 3-DOF planer
    Kasim, HS
    Low, KH
    Chen, WJ
    2004 8TH INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION, ROBOTICS AND VISION, VOLS 1-3, 2004, : 1762 - 1768
  • [5] A Flexure-based 3-DOF Parallel Mechanism for Optical Fiber Assembly
    Jiang, Lusha
    Zhang, Jianbin
    Chen, Weihai
    Chen, Wenjie
    2013 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO), 2013, : 303 - 308
  • [6] Design and Analysis of a 3-DOF Planar Flexure-based Parallel Mechanism with Large Motion Range
    Yang, Bao
    Zhang, Chi
    Yu, Hongtao
    Huang, Xiaolu
    Yang, Guilin
    Chen, Silu
    2018 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND BIOMIMETICS (ROBIO), 2018, : 1888 - 1893
  • [7] A flexure-based five-bar mechanism for micro/nano manipulation
    Tian, Y.
    Shirinzadeh, B.
    Zhang, D.
    SENSORS AND ACTUATORS A-PHYSICAL, 2009, 153 (01) : 96 - 104
  • [8] Design, Identification and Control of a 2-Degree of Freedom Flexure-Based Mechanism for Micro/Nano Manipulation
    Li, X.
    Tian, Y.
    Qin, Y.
    Wang, F.
    Gao, W.
    Zhang, D.
    Eichhorn, V.
    Fatikow, S.
    NANOSCIENCE AND NANOTECHNOLOGY LETTERS, 2013, 5 (09) : 960 - 967
  • [9] Performance Evaluation of a Flexure-based Five-bar Mechanism for Micro/nano Manipulation
    Tian, Yanling
    Shirinzadeh, Bijan
    2009 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS, VOLS 1-3, 2009, : 76 - 81
  • [10] Analysis and Design of a 3-DOF Flexure-based Zero-torsion Parallel Manipulator for Nano-alignment Applications
    Yang, Guilin
    Teo, Tat Joo
    Chen, I-Ming
    Lin, Wei
    2011 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA), 2011, : 2751 - 2756
12345