Impurity Measurements in Polycrystalline Materials with Atom Probe Tomography

被引：0
|
作者：
Ronsheim, P. [1 ]
Hatzistergos, M. [1 ]
Flaitz, P. [1 ]
机构：
[1] IBM Microelect, Hopewell Jct, NY 12533 USA
来源：
MICROSCOPY AND MICROANALYSIS | 2009年 / 15卷
关键词：
D O I：
10.1017/S1431927609097621
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：276 / 277
页数：2
相关论文
共 50 条
  • [1] Impurity measurements in silicon with D-SIMS and atom probe tomography
    Ronsheim, P.
    Flaitz, P.
    Hatzistergos, M.
    Molella, C.
    Thompson, K.
    Alvis, R.
    [J]. APPLIED SURFACE SCIENCE, 2008, 255 (04) : 1547 - 1550
  • [2] Atom probe tomography of electronic materials
    Kelly, Thomas F.
    Larson, David J.
    Thompson, Keith
    Alvis, Roger L.
    Bunton, Joseph H.
    Olson, Jesse D.
    Gorman, Brian P.
    [J]. ANNUAL REVIEW OF MATERIALS RESEARCH, 2007, 37 (681-727) : 681 - 727
  • [3] Dopant measurements in semiconductors with atom probe tomography
    Ronsheim, P. A.
    Hatzistergos, M.
    Jin, S.
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 28 (01): : C1E1 - C1E4
  • [4] Characterization of Nanoporous Materials with Atom Probe Tomography
    Pfeiffer, Bjoern
    Erichsen, Torben
    Epler, Eike
    Volkert, Cynthia A.
    Trompenaars, Piet
    Nowak, Carsten
    [J]. MICROSCOPY AND MICROANALYSIS, 2015, 21 (03) : 557 - 563
  • [5] Atom probe tomography—A cornerstone in materials characterization
    Yaron Amouyal
    Guido Schmitz
    [J]. MRS Bulletin, 2016, 41 : 13 - 18
  • [6] Atom probe tomography of nanoscale electronic materials
    Larson, D. J.
    Prosa, T. J.
    Perea, D. E.
    Inoue, K.
    Mangelinck, D.
    [J]. MRS BULLETIN, 2016, 41 (01) : 30 - 34
  • [7] Development of Atom Probe Tomography for Biological Materials
    Greene, Mark E.
    Prosa, Ty J.
    Panitz, John A.
    Larson, David J.
    Kelly, Thomas F.
    [J]. MICROSCOPY AND MICROANALYSIS, 2009, 15 : 582 - 583
  • [8] Atom probe tomography studies of rf materials
    Norem, J
    Bauer, P
    Sebastian, J
    Seidman, DN
    [J]. 2005 IEEE PARTICLE ACCELERATOR CONFERENCE (PAC), VOLS 1-4, 2005, : 1310 - 1312
  • [9] Atom probe tomography of nanoscale electronic materials
    D. J. Larson
    T. J. Prosa
    D. E. Perea
    K. Inoue
    D. Mangelinck
    [J]. MRS Bulletin, 2016, 41 : 30 - 34
  • [10] Nanoscale characterization of powder materials by atom probe tomography
    Larde, R.
    Bran, J.
    Jean, M.
    Le Breton, J. M.
    [J]. POWDER TECHNOLOGY, 2011, 208 (02) : 260 - 265
12345