Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment

被引：0
|
作者：
Pensala, T [1 ]
Ylilammi, M [1 ]
Makkonen, T [1 ]
机构：
[1] VTT Tech Res Ctr Finland, VTT Informat Technol Microelect, Espoo, Finland
来源：
2005 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 | 2005年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
Spurious resonance suppression in ZnO based thin film BAW resonators by the boundary ring method of [1] is studied. Electrical responses of resonators with varying width of the boundary ring structure are measured. Very clean resonator response is reached with optimum dimensions. Emergence of the piston mode and simultaneous spurious resonance suppression is demonstrated by 2D FEM simulation with a model corresponding to the measured devices. Good correlation between measurement and simulation is found.
引用
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页码：1844 / 1847
页数：4
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