Micromachined silicon bolometers as detectors of soft X-ray, ultraviolet visible and infrared radiation

被引：19
|
作者：
Dobrzanski, L [1 ]
NossarzewskaOrlowska, E [1 ]
Nowak, Z [1 ]
Piotrowski, J [1 ]
机构：
[1] VIGO SYST LTD,PL-01497 WARSAW,POLAND
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 60卷 / 1-3期
关键词：
micromachining; silicon bolometers; radiation detectors;
D O I：
10.1016/S0924-4247(97)01512-4
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the development of micromachined thin-film silicon microbolometers which can be used for detection of soft X-ray, UV, visible and infrared radiation. The detector structure is a 1 mu m thick polysilicon/Si3N4 membrane suspended over a cavity. This structure has been obtained by anisotropic etching of silicon with a previously deposited polysilicon/Si3N4 sandwich. Alternatively, porous silicon has been used as the sacrificial layer. Devices have been characterized. Good values of the voltage responsivity and detectivity have been obtained.
引用
收藏
页码：154 / 159
页数：6
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