Three-dimensional staggered herringbone mixer fabricated by femtosecond laser direct writing

被引：20
|
作者：
Lin, Di [1 ,2 ]
He, Fei [1 ]
Liao, Yang [1 ]
Lin, Jintian [1 ,2 ]
Liu, Changning [1 ,2 ]
Song, Jiangxin [1 ,2 ]
Cheng, Ya [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
来源：
JOURNAL OF OPTICS | 2013年 / 15卷 / 02期
基金：
中国国家自然科学基金;
关键词：
femtosecond laser; microchannel in glass; 3D direct writing; MICROFLUIDIC CHANNELS; MICROMIXERS; MICROFABRICATION; PHYSICS; GLASS;
D O I：
10.1088/2040-8978/15/2/025601
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We report on the fabrication of a three-dimensional (3D) staggered herringbone mixer (SHM) on a fused silica chip by femtosecond laser microfabrication, enabled by the 3D nature of femtosecond laser direct writing. We theoretically and experimentally show that a 3D SHM with patterns on not only the bottom floor but also the side walls can reduce the mixing length by almost half as compared with the conventional 2D SMH mixer.
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页数：5
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