Fabrication of Organic Thin-Film Transistors with Polymer Gate Insulators on Plastic Substrate

被引：0

作者：

Ahn, Seong Deok ^{[1
]}

Kang, Seung Youl ^{[1
]}

Oh, Ji Young ^{[1
]}

You, In Kyu ^{[1
]}

Kim, Gi Heon ^{[1
]}

Baek, Kyu Ha ^{[1
]}

Kim, Chul Am ^{[1
]}

Suh, Kyung Soo ^{[1
]}

机构：

[1] Elect & Telecommun Res Inst, Taejon 305350, South Korea

来源：

IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS | 2006年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Active layer patterned OTFT was obtained on a plastic substrate using the optimal growth condition of pentacene thin films as active layer and parylene thin films as passivation layer. Tranditional photolithography was performed to use a dry etch to pattern the material stack. The pentacene thin film and parylene thin film were deposited onto a plastic substrate using PC-OVD and CVD, respectively.

引用

页码：1170 / 1173

页数：4

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