共 50 条
- [16] Design and Fabrication of Silicon Nanowire-based MEMS Microphones 2019 19TH INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION AND SYSTEMS (ICCAS 2019), 2019, : 1685 - 1688
- [18] 110 GHz Nanowire-Based Integrated Via Technology for 3D Silicon Integration 2022 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS 2022), 2022, : 587 - 590