The design and fabrication of a flexible three-dimensional force sensor skin

被引：0

作者：

Shan, JH ^{[1
]}

Mei, T ^{[1
]}

Sun, L ^{[1
]}

Kong, DY ^{[1
]}

Zhang, ZY ^{[1
]}

Ni, L ^{[1
]}

Meng, M ^{[1
]}

Chu, JR ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Intelligent Machines, State Key Labs Transducer Technol, Hefei 230031, Anhui, Peoples R China

来源：

2005 IEEE/RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS, VOLS 1-4 | 2005年

关键词：

MEMS sensor; three-dimensional force; flexible skin;

D O I：

暂无

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

To obtain shear and normal stress information on non-planar surfaces has long been a significant challenge. This paper described a new version of flexible tactile sensor skin for three-dimensional force measurement. The sensor array has been fabricated by MEMS technology. The sensor skin which can be bended 90 includes 4x4 force sensor cells. Each cell is hybrid integrated to flexible printing circuit board which consists of a E-shape diaphragm( 50 mu m thick and 4000 mu m wide). Each cell exhibits a sensitivity of 228 mv/N to normal force and 34 mv/N to shear force in the designed force range of 2N. Design analysis, fabrication processes, and experimental results are presented in this paper.

引用

页码：1965 / 1970

页数：6

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