Laser ablation using high repetition rate Cu/HBr laser

被引：0
|
作者：
Fernández, CDJ
Pique, JP
Givord, D
机构：
[1] Univ Padua, INFM, Dipartimento Fis, I-54124 Padua, Italy
[2] Univ Grenoble 1, Spectrometrie Phys Lab, UMR 5588, CNRS, F-38402 St Martin Dheres, France
[3] CNRS, Lab Louis Neel, F-38042 Grenoble 9, France
来源：
THIN SOLID FILMS | 2004年 / 453卷
关键词：
magnetic film-assisted deposition; CuHBr laser; pulsed laser deposition;
D O I：
10.1016/j.tsf.2003.11.100
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The application of a home made Cu/HBr laser for pulsed laser deposition is investigated. This laser operates at 15 KHz repetition rate with 50 ns pulses of two wavelengths (578 and 510 nm) and with a maximum total power of 100 W. The parameters which define the ablation condition and the specific plasma features are determined and compared to those obtained using a Nd:YAG laser. The effects of including a magnetic field oriented perpendicularly to the target plane in the plasma expansion region are examined. With the Cu/HBr laser the frontal deposition rate is 4 times higher than that obtained with the Nd:YAG laser, increasing up to 40 times when the magnetic field is included in the set-up. However, the ablation process has a duration of 30-40 s and decreases drastically at longer times. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码：345 / 349
页数：5
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