Modular software system for computer aided design of microsystems

被引：3
|
作者：
Straube, D
Triltsch, U
Franke, HJ
Büttgenbach, S
机构：
[1] Tech Univ Carolo Wilhelmina Braunschweig, Inst Engn Design, D-38106 Braunschweig, Germany
[2] Tech Univ Carolo Wilhelmina Braunschweig, Inst Microtechnol, D-38106 Braunschweig, Germany
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2006年 / 12卷 / 07期
关键词：
process compatibility; tolerance management; T-CAD; acceleration sensor;
D O I：
10.1007/s00542-006-0083-5
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A modular software system to assist engineers in designing microsystems is presented. The different modules support both the system and the component design and are linked with each other by a workflow management system. In particular, this paper presents the co-operation of the modules rumtopf, suzana and mu-toast. They assist the designer in the definition and validation of process sequences, the simulation of wet chemical etching of silicon and the tolerance management. The usage and usefulness of the presented software system is illustrated by an example showing the design of an acceleration sensor.
引用
收藏
页码：650 / 654
页数：5
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