Modular software system for computer aided design of microsystems

被引：3
|
作者：
Straube, D
Triltsch, U
Franke, HJ
Büttgenbach, S
机构：
[1] Tech Univ Carolo Wilhelmina Braunschweig, Inst Engn Design, D-38106 Braunschweig, Germany
[2] Tech Univ Carolo Wilhelmina Braunschweig, Inst Microtechnol, D-38106 Braunschweig, Germany
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2006年 / 12卷 / 07期
关键词：
process compatibility; tolerance management; T-CAD; acceleration sensor;
D O I：
10.1007/s00542-006-0083-5
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A modular software system to assist engineers in designing microsystems is presented. The different modules support both the system and the component design and are linked with each other by a workflow management system. In particular, this paper presents the co-operation of the modules rumtopf, suzana and mu-toast. They assist the designer in the definition and validation of process sequences, the simulation of wet chemical etching of silicon and the tolerance management. The usage and usefulness of the presented software system is illustrated by an example showing the design of an acceleration sensor.
引用
收藏
页码：650 / 654
页数：5
相关论文
共 50 条
  • [1] Modular software system for computer aided design of microsystems
    D. Straube
    U. Triltsch
    H.-J. Franke
    S. Büttgenbach
    [J]. Microsystem Technologies, 2006, 12 : 650 - 654
  • [2] Computer-aided fixture design system for comprehensive modular fixtures
    Hou, JL
    Trappey, AJC
    [J]. INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, 2001, 39 (16) : 3703 - 3725
  • [3] Creation of Computer Aided Manufacturing software from Computer Aided Design software in the milling process
    Carrasco Garcia, Juan Carlos
    [J]. HOMBRE Y LA MAQUINA, 2013, (41): : 81 - 87
  • [4] Integrated Computer-Aided Design System Software of Navigation Complex
    Sineglazov, Victor
    Godny, Andrew
    [J]. 2016 4TH INTERNATIONAL CONFERENCE ON METHODS AND SYSTEMS OF NAVIGATION AND MOTION CONTROL (MSNMC), 2016, : 59 - 62
  • [5] Software design of computer-aided ventilation and dust control system
    Lin, Xiu-Li
    Zhang, Yao-Man
    Liu, Guang-Xuan
    Cao, Ya-Ping
    [J]. 2ND ANNUAL INTERNATIONAL CONFERENCE ON ENERGY, ENVIRONMENTAL & SUSTAINABLE ECOSYSTEM DEVELOPMENT (EESED 2016), 2016, 115 : 296 - 302
  • [6] SOFTWARE ARCHITECTURE OF INTEGRATED COMPUTER-AIDED DESIGN AND MANUFACTURING SYSTEM
    KANATANI, Y
    CHOSHI, T
    HOTOGE, K
    [J]. FUJITSU SCIENTIFIC & TECHNICAL JOURNAL, 1987, 23 (04): : 341 - 352
  • [7] MODULAR SYSTEM FOR COMPUTER-AIDED MANUFACTURE
    GOTTSCH, N
    [J]. WERKSTATTSTECHNIK ZEITSCHRIFT FUR INDUSTRIELLE FERTIGUNG, 1985, 75 (07): : 409 - 412
  • [8] A modular software system for computer-aided surgery and its first application in oral implantology
    Birkfellner, W
    Huber, K
    Larson, A
    Hanson, D
    Diemling, M
    Homolka, P
    Bergmann, H
    [J]. IEEE TRANSACTIONS ON MEDICAL IMAGING, 2000, 19 (06) : 616 - 620
  • [9] COMPUTER AIDED DESIGN OF AN MODULAR MILLING GEAR HOB
    Ciofu, Ciprian Dumitru
    Tabacaru, Lucian
    Carausu, Constantin
    Tataru, Mihai
    [J]. MODTECH 2010: NEW FACE OF TMCR, PROCEEDINGS, 2010, : 211 - 214
  • [10] AN INTERACTIVE SOFTWARE SYSTEM FOR COMPUTER-AIDED DESIGN - AN APPLICATION TO CIRCUIT PROJECT
    BRACCHI, G
    SOMALVICO, M
    [J]. COMMUNICATIONS OF THE ACM, 1970, 13 (09) : 537 - +
12345