BaTiO3 nanocomposite thin film as pyroelectric sensor

BaTiO3 thin films are commonly used as a pyroelecrtic sensor because this material has a good dielectric, ferroelectric and piezoelectric properties. This paper reports the pyroelectric sensor performance of BaTiO3 nanocomposite thin films. The BaTiO3 nanoparticles were synthesized and deposited as nanocomposite thin films on Si/SiO2/RuO2 substrate using spin coating technique. The deposited films were dried at 200 degrees C for 2 hours and annealed at 700 T for 1 hour in air. Pyroelectric performance of the fabricated sensor was carried out at temperature in the range of 30 to 58 degrees C using short-circuit current method. The heating rate was set up to 0.4 degrees C/s. It was found the device showed the pyroelectric response when heated and the pyroelectric coefficients of the device are in the range of 43-1300 mu C cm(-2) K-1.