Integrated design of the feedback controller and topography estimator for atomic force microscopy

被引：7
|
作者：
Kuiper, S. [1 ]
Van den Hof, P. M. J. [2 ,3 ]
Schitter, G. [4 ]
机构：
[1] TNO Tech Sci, NL-2628 CK Delft, Netherlands
[2] Delft Univ Technol, Delft Ctr Syst & Control, NL-2628 CD Delft, Netherlands
[3] Eindhoven Univ Technol, Control Syst Grp, Dept Elect Engn, NL-5612 AZ Eindhoven, Netherlands
[4] Vienna Univ Technol, Automat & Control Inst, A-1040 Vienna, Austria
来源：
CONTROL ENGINEERING PRACTICE | 2013年 / 21卷 / 08期
基金：
美国国家卫生研究院;
关键词：
Atomic force microscopy; Model-based control; Robust control; Topography estimation; Optimal filter design; IDENTIFICATION; COMPENSATION; HYSTERESIS;
D O I：
10.1016/j.conengprac.2013.03.006
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
In atomic force microscopy (AFM) the force between the measurement tip and the sample is controlled in a feedback loop to prevent damage of the tip and sample during imaging, and to convert the measurement of the tip-sample force into an estimate of the sample topography. Dynamical uncertainties of the system limit the achievable control bandwidth and the accuracy of the topography estimation. This paper presents an integrated approach to design a feedback controller and topography estimator, taking into account the dynamical uncertainties of the system. The proposed methodology is experimentally demonstrated on a commercial AFM system, showing a direct trade-off between the control bandwidth and the accuracy of the topography estimation. (C) 2013 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1110 / 1120
页数：11
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