High-performance ZnO nanoflake moisture sensor

被引：55
|
作者：
Bu, Ian Y. Y. [1 ,2 ]
Yang, Chih-Chin [1 ]
机构：
[1] Natl Kaohsiung Marine Univ, Dept Microelect Engn, Kaohsiung 81157, Taiwan
[2] Natl Cheng Kung Univ, Res Ctr Energy Technol & Strategy, Tainan 70101, Taiwan
来源：
SUPERLATTICES AND MICROSTRUCTURES | 2012年 / 51卷 / 06期
关键词：
Zinc oxide; Humidity sensor; Nanoflake; ZINC-OXIDE NANOWIRES; SENSING PROPERTIES; FILMS; GROWTH;
D O I：
10.1016/j.spmi.2012.03.009
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
Humidity control is an important issue across variety of industries. In this study, a novel zinc oxide (ZnO) flake-based humidity sensor was fabricated and characterized. It was found that fast response sensor can be achieved by substituting conventional sputter ZnO thin films with nano-flakes. It is proposed that the enhancement in dynamic performance originate from the high surface area offered by the nanoflakes. (c) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码：745 / 753
页数：9
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