Applications of non-periodic multilayer optics for high-resolution x-ray microscopes below 30 keV

被引：7
|
作者：
Troussel, Ph. [1 ]
Dennetiere, D. [1 ]
Rousseau, A. [1 ]
Darbon, S. [1 ]
Hoghoj, P. [2 ]
Hedacq, S. [2 ]
Krumrey, M. [3 ]
机构：
[1] DIF, CEA, DAM, F-91297 Arpajon, France
[2] XENOCS SA, F-38360 Sassenage, France
[3] PTB, D-10587 Berlin, Germany
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 10期
关键词：
D O I：
10.1063/1.4738661
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Multilayer mirrors with enhanced bandwidth were developed with special performances for dense plasma diagnostics and mainly for high spatial resolution x-ray imaging. The multilayer coatings are designed to provide broadband x-ray reflectance at low grazing incidence angles. They are deposited onto toroidal mirror substrates. Our research is directed at the development of non-periodic (depth graded) W/Si multilayer specifically designed for use in the 1 to 30 keV photon energy band. First, we present a study for a 5 to 22 keV x-ray spectral window at 0.45 degrees. grazing angle. The goal is to obtain a high and constant reflectivity. Second, we have modeled a broadband mirror coating for harder x-rays in the range from 10 to 30 keV, with a non-periodic structure containing 300 W/SiC layers with periods in the range from 0.8 to 4 nm, designed for 0.35 degrees grazing incidence angle. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4738661]
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页数：3
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