共 50 条
- [21] Influence of magnets' phyllotactic arrangement in cluster magnetorheological effect finishing process INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2018, 99 (5-8): : 1699 - 1712
- [23] Ultra Smooth Polishing Research Based on the Cluster Magnetorheological Effect ADVANCES IN GRINDING AND ABRASIVE TECHNOLOGY XVI, 2011, 487 : 283 - 288
- [24] Effect of abrasive in Cu-CMP slurry on global planarization ADVANCES IN CHEMICAL-MECHANICAL POLISHING, 2004, 816 : 107 - 111
- [25] Effect of nanosilica abrasive properties on tungsten chemical mechanical planarization Journal of Materials Science: Materials in Electronics, 2024, 35
- [27] An ultra-smooth planarization method for controlling fluid behavior in cluster magnetorheological finishing based on computational fluid dynamics PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2022, 74 : 358 - 368