Design and Analysis of MEMS based Piezoresistive Pressure sensor for Sensitivity Enhancement

This paper reported novel high sensitivity and linear 0-1MPa piezoresistive pressure sensor for environmental applications. The proposed work as two different structures of membrane (square and rectangular) having the similar surface area and thickness has been studied. The design and analyzed pressure sensor parameters such as stress, deflection and sensitivity are obtained by using INTELLISUITE 8.8v. The simulated sensor showed a sensitivity of 6.8x10(-12) for 7 mu m thickness, 18.5x10(-12) for 5 mu m thickness and 84.2x10(-12) for 3 mu m thicknessof square membrane is prepared through the finite element tool. This deflection change providesthe validate of the pressure in that atmosphere. Finally, we observed that the best deflection obtained from square membrane and maximum stress output reactions are obtained from the rectangular membrane with the pressure range from 0.1 MPa to 1MPa and also maximum deformation of 84 mu m for 3 mu m thickness, 18.55 mu m for 5 mu m thickness and 6.9 mu m for 7 mu m thickness. The effect of these studies can be used to improve the sensitivity of these devices. (c) 2017 Elsevier Ltd. All rights reserved.