Application of round grating angle measurement composite error amendment in the online measurement accuracy improvement of large diameter

被引:0
|
作者
Wang, Biao [1 ]
Yu, Xiaofen [1 ]
Li, Qinzhao [1 ]
Zheng, Yu [1 ]
机构
[1] Hefei Univ Technol, Sch Instrument Sci & Optoelect Engn, Hefei 230009, Anhui, Peoples R China
关键词
Round grating; Angle measurement composite error; Soft simulation; Error amendment;
D O I
10.1117/12.806568
中图分类号
V [航空、航天];
学科分类号
08 ; 0825 ;
摘要
The paper aiming at the influence factor of round grating dividing error, rolling-wheel produce eccentricity and surface shape errors provides an amendment method based on rolling-wheel to get the composite error model which includes all influence factors above, and then corrects the non-circle measurement angle error of the rolling-wheel. We make soft simulation verification and have experiment; the result indicates that the composite error amendment method can improve the diameter measurement accuracy with rolling-wheel theory. It has wide application prospect for the measurement accuracy higher than 5 mu m/m.
引用
收藏
页数:5
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